CAMECA IMS 6F (SIMS) For Sale

Model Year:	1996
Quantity:	1
Condition:	Good operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

 Cameca IMS 6F Sims Instrument configured as follows:

• laminate magnet
• cesium micro beam ion source
• anti-contamination cold plate
• dinamic transfer optics
• load lock system for sample inlet
• TV camera for projection ion image observation
• ion pump exhaust system
• camera data system
• DUO  duo plasmatron ion source
• PBMA primary ion mass filter
• ISOCMS gate valve and exhaust for cesium micro beam ion source
• MIL multiple drawer lens
• CSVS TV system for new type sample surface observation
• NEG vertical incidence electron gun for insulation material  analyzer
• SID scanning ion observation system/RAE resistive anode emcoder
• DIP digital image processing system
• SEI secondary electron system
• Manual oxigen leak system
• FABIM newtral particle irradiation source
• computer system for re-prot

 

Tool specifications are as follows:

• Mass resolution:  over M/△M=25,000
• Mass range:  1～560a.m.u
• Sensitivity:   ppm～ppb
• Analysis area: 0.2umφ～500um

 

Image Resolution: 

• 0.5um(projection mode)
• 0.2um(scan mode)

 

Primary Ion Beam diameter:

• 0.3um～200um(O2)
• 0.2um～200um(Cs)

 

Primary Ion Beam density:

• over 150mA/cm2
• (O2,Cs)
• secondary ion energy width: 0～130eV
• sample chamber pressure: 6.7X10-8Pa(5X10-10torr)
• sample stage: moving Xymm,accuracy 1um
• sample size: 25mmφX13mmH

 

 

Comments:

• Excellent operational condition
• Deinstalled and crated in March 2010

 

Please contact us for more details and price quote.