CAMECA IMS 6F (SIMS) For Sale

Model Year: 1998
Quantity: 1
Condition: Complete system
Serial No: Available upon request
Availability: SOLD

Configuration:

 

 Cameca IMS 6F Sims Instrument configured as follows:

  • laminate magnet
  • cesium micro beam ion source
  • anti-contamination cold plate
  • dinamic transfer optics
  • load lock system for sample inlet 
  • TV camera for projection ion image observation
  • ion pump exhaust system
  • camera data system
  • DUO  duo plasmatron ion source
  • PBMA primary ion mass filter
  • ISOCMS gate valve and exhaust for cesium micro beam ion source
  • MIL multiple drawer lens
  • CSVS TV system for new type sample surface observation
  • NEG vertical incidence electron gun for insulation material  analyzer
  • SID scanning ion observation system/RAE resistive anode emcoder
  • DIP digital image processing system
  • SEI secondary electron system
  • Manual oxigen leak system
  • FABIM newtral particle irradiation source
  • computer system for re-prot

 

Tool specifications are as follows:

  • Mass resolution:  over M/△M=25,000
  • Mass range:  1~560a.m.u
  • Sensitivity:   ppm~ppb
  • Analysis area:  0.2umφ~500um

 

Image Resolution: 

  • 0.5um(projection mode)
  • 0.2um(scan mode)

 

Primary Ion Beam diameter:

  • 0.3um~200um(O2)
  • 0.2um~200um(Cs)

 

Primary Ion Beam density:

  • over 150mA/cm2
  • (O2,Cs)
  • secondary ion energy width: 0~130eV
  • sample chamber pressure: 6.7X10-8Pa(5X10-10torr)
  • sample stage: moving Xymm,accuracy 1um
  • sample size: 25mmφX13mmH

 

 

 


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