CAMECA IMS 6F (SIMS) For Sale
| Model Year: | 1998 |
| Quantity: | 1 |
| Condition: | Complete system |
| Serial No: | Available upon request |
| Availability: | SOLD |
Configuration:
Cameca IMS 6F Sims Instrument configured as follows:
- laminate magnet
- cesium micro beam ion source
- anti-contamination cold plate
- dinamic transfer optics
- load lock system for sample inlet
- TV camera for projection ion image observation
- ion pump exhaust system
- camera data system
- DUO duo plasmatron ion source
- PBMA primary ion mass filter
- ISOCMS gate valve and exhaust for cesium micro beam ion source
- MIL multiple drawer lens
- CSVS TV system for new type sample surface observation
- NEG vertical incidence electron gun for insulation material analyzer
- SID scanning ion observation system/RAE resistive anode emcoder
- DIP digital image processing system
- SEI secondary electron system
- Manual oxigen leak system
- FABIM newtral particle irradiation source
- computer system for re-prot
Tool specifications are as follows:
- Mass resolution: over M/△M=25,000
- Mass range: 1～560a.m.u
- Sensitivity: ppm～ppb
- Analysis area: 0.2umφ～500um
Image Resolution:
- 0.5um(projection mode)
- 0.2um(scan mode)
Primary Ion Beam diameter:
- 0.3um～200um(O2)
- 0.2um～200um(Cs)
Primary Ion Beam density:
- over 150mA/cm2
- (O2,Cs)
- secondary ion energy width: 0～130eV
- sample chamber pressure: 6.7X10-8Pa(5X10-10torr)
- sample stage: moving Xymm,accuracy 1um
- sample size: 25mmφX13mmH
Comments:
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