FEI 820 Dual Beam FIB/SEM For Sale

Model Year:	N/A
Quantity:	1
Condition:	Excellent operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Electron Beam Column:
•Schottky Field Emission Gun
•0-30kV Accelerating Voltage
•7nm @1kV Resolution

Ion Beam Column:
•Ga LMIS Ion Source
•30kV Accelerating Voltage
•7nm @30kV / 11nA Resolution

Specimen Stage:
•xy - 205mm x 205mm
•z  - 25mm
•t  - 0° to 52°
•r  - 360°
•Access - 200mm load lock for wafers and pieces

Detectors:
CDEM, E/T

User Interface:
PC with Windows NT operating system

Gases: 
•Platinum Metal Deposition
•Iodine Insulator Deposition
•Noran EDX for X-Ray Microanalysis

Vacuum System:
•Ion Pumps for Column
•Turbo pump for Chamber
•Mechanical roughing pump

Comments:

This FIB system is installed and is in very good operational condition.  If you are interested in more details or would like to inspect the tool, please contact us.