FEI MICRION 986+ IET/WDR For Sale

Model Year:	2002
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Original configuraton: Vectra 986 FC Ion Mill

Upgraded to IET/WDR in Sept 2012
OS upgraded from Unix/Linux to Windows

Ion Mill Column / 5nm next gen Column with WDR upgrade (lowered working position)

8 inch Laser Stage

Gas Used
- Chlorine or Bromine (CL2 was used early on in the development of the tool and then switched to Bromine because of better etch qualities over CL2)
- Xenon Diflouride
- Siloxane (TMCTS) or (Tetramethylcyclotetrasiloxane)
- Oxygen
- Tungsten

Ready for 14nm and possibility for 10nm (untested)

Not included:
- Navigation software license
- IR Camera

THIS INSTRUMENT IS REFURBISHED AND READY FOR FULL OPERATIONAL INSPECTION !

 

Comments:

Complete and refurbished system available for full demonstration.