Model Year: N/A
Quantity: 1
Condition: Excellent operational condition
Serial No: Available upon request
Availability: SOLD


August NSX-90 is a macro defect inspection tool solution used through out the device manufacturing process. Macro defects (defects 5 micron and larger) can take place during wafer manufacturing, probing, bumping, dicing, or by general handling, and can have a major impact on the quality of a microelectronic device. The NSX-90 quickly and accurately detects yield-inhibiting defects, providing quality assurance and valuable process information. 

Original equipment specs are as follows:

Camera and Optics:

Review camera CCD : 3CCD Color

Review camera Resolution : 752pixels*582 lines 

Second Camera CCD (Option): B/W Digitial

Second camera Resolution : 1008pixels*1018 lines

Objectives: 1.25X to 20X(Automated inspection )

Magnification at Review Monitor: 50X to 2000X 

Magnification for Second Camera at Monitor: 50X to 3000X(Depending on the photo eyepiece lens)

Second Camera PE lenses:3.3x

- Throughput: 

- 8”: ≧ 6.5 WPH 

- 6”: ≧ 8.2 WPH


This unit is configured with Wafer handler for 8" wafers.




This tool is available for immediate sale in as-is-where-is terms.  It is presently in storage.  Visual inspection can be arranged.  Power up inspection is not possible. 

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