KLA-Tencor 5200 Overlay For Sale

Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


GCE technicians are well experienced with KLA overlay models including 5100, 5100XP, 5200, 5200XP and 5300. WIth GCE, you can be confident that you are dealing with professionals with technical expertise and experience.


  • KLA 5200 Overlay Metrology System
  • Configured for 150mm and 200mm wafer size
  • Windows user interface


Software version 14.30.11 installed with following options:

  • Array Target
  • CPM Phase Overlay
  • CPM Amplitude
  • Fast Overlay


More details coming soon........


  • System is guaranteed to meet OEM specs 
  • 3 months parts warranty


Full power up inspection at our Blackwood, NJ USA facility can be scheduled upon request.


Please contact us for more details and price quote.

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