KLA-Tencor SP1 Classic For Sale

Model Year: 2001
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


KLA-Tencor Surfscan SP1 Classic

Non-Patterned Wafer Particle Measurement System

Provides Sensitivity, Repeatability, Surface Quality Measurements & Throughput Capabilities Required for 0.18um Process Technologies & Beyond

Configured for 200mm wafers

Single Open Cassette Loader

0.08um Defect Sensitivity on Well-Polished Silicon, 95% Capture

Defect Map & Histogram with Zoom Micro View Measurement Capability

Illumination: 30 mW Argon-Ion Laser, 488nm Wavelength

Operator Interface: MS Windows NT 4.0

Flat Panel Display

Operations Manual


This tool is fully refurbished and is guaranteed to Meet Original Specifications.  Full operational demonstration can be arranged at our facility in Blackwood, NJ.

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