KLA-Tencor SP1 Classic For Sale

Model Year:	2001
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

KLA-Tencor Surfscan SP1 Classic

Non-Patterned Wafer Particle Measurement System

Provides Sensitivity, Repeatability, Surface Quality Measurements & Throughput Capabilities Required for 0.18um Process Technologies & Beyond

Configured for 200mm wafers

Single Open Cassette Loader

0.08um Defect Sensitivity on Well-Polished Silicon, 95% Capture

Defect Map & Histogram with Zoom Micro View Measurement Capability

Illumination: 30 mW Argon-Ion Laser, 488nm Wavelength

Operator Interface: MS Windows NT 4.0

Flat Panel Display

Operations Manual
 

Comments:

This tool is fully refurbished and is guaranteed to Meet Original Specifications.  Full operational demonstration can be arranged at our facility in Blackwood, NJ.