KLA-Tencor 5200XP Overlay For Sale

Model Year: 1998
Quantity: 2
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


This item can also be purchased via GCE's ebay sales agent: KLA Tencor 5200XP ebay listing

KLA-Tencor 5200XP Overlay Measurement System
Wafer size:  4" - 8" capable
Currently Configured for 200mm
Can reconfigure to other sizes
Dual Cassette Autoloader -Integrated SMIF
Can also run open cassette
LINKS Automation
Automatic Arrayed Target
Port Vacuum Box
Coherence Probe Metrology Option (CPM)
GEM/SECS Interface

Configured with the following options:
- CD

- OS: Windows NT 4.1
- System SW ver: 14.16.02
- KLASS SW ver:
- KLAUT SW Option
- 3.5” Floppy Drive
- CD-Rom Drive
- 9GB Hdd
- 2GB Tape Drive
- 10Base-T (BNC) Interface
- Video Printer

Power Requirements: V 208, A 7.5, Phase 2, Freq 50/60 Hz


Complete turn-key solution offered including refurbished system with demonstration at our facility in New Jersey, professional crating and shipping worldwide, installation and warranty support worldwide.

In addition to this overlay system, we can offer to you a complete solution for lithography cluster if you are looking to set up a small to mid-size Litho cleanroom.  Our Litho cluster turn-key solution includes Canon steppers, TEL tracks, KLA or Hitachi CDSEMs, and KLA overlay tools.  GCE owns a variety of high quality tools and can make you and attractive total solution for litho cluster for your future project.  Our solution includes fully refurbished equipment with demonstration at GCE facilities, crating and shipping, as well as installation, training, and support worldwide.  Please contact us to learn more.

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