KLA-Tencor 5300 Overlay For Sale

Model Year: 2001
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


200mm open cassette
300mm open cassette

Windows NT 4.0 workstation   Version: 4.00.1381
18GB Hard Drive/128 MB RAM
3.5 inch floppy drive
CD-ROM drive
Tape backup system (DAT)
Network ready – 10base-T, BNC, and AUI connection
Thermal Printer
UPS (Uninterruptable Power Supply)

Software (as originally configured):
KLA-Tencor 15.20 software for 5300 systems
• Main Software – Version 15.20.09
• User Interface – Version 15.20.07
• KLAUT – Version 7.01.14
• KLAUT RPLs – Version 1.01.11
• Motion Firmware – Version 3.13ax
• Motion Setup – Version 5.08
• Handler software – Version 1.3.1agp5
Software License Keys (as originally configured):
FAST Overlay (FTOVL)
Performance Criteria
TIS (Tool Induced Shift)   Mean ≤4nm;  Variability ≤7nm
Short Term Dynamic Precision  ≤3nm
Long Term Dynamic Precision  ≤3nm
Time Per Site  ≤1.8 seconds
Throughput  ≥105 Wafers per hour

Utility Requirements:
208/230 VAC , 50/60 Hz, Single Phase, 15 Amps
Compressed Air: 5.5 bar (90-110 psi)
Handling Vacuum: 0.5-0.6 kg/cm2 (20-21 inchesHg)

GCE technicians are well experienced with KLA overlay models including 5100, 5100XP, 5200, 5200XP and 5300.  WIth GCE, you can be confident that you are dealing with professionals with technical expertise and experience.


  • System is guaranteed to meet OEM specs
  • 3 months parts warranty
  • Full power up inspection at our Blackwood, NJ USA facility can be scheduled upon request.

Please contact us, for more details and price quote.

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