KLA-Tencor AFS 3220FA Mark IV For Sale

Model Year: 2001
Quantity: 1
Condition: Excellent operational condition
Serial No: Available upon request
Availability: SOLD


  • Advanced Flatness System (AFS) measures thickness, flatness and shape of silicon, epi and SOI wafers. Suitable for 130nm and 90nm site flatness technology nodes. 
  • Configured for 300mm wafers
  • Measures etched, polished, epi, SOI and reclaim wafers 
  • High throughput and sorting 
  • Reliable edge grip handling 
  • Integral NIST traceable masters 
  • 1mm edge exclusion 
  • Bulk resistivity and conductivity type options.


Full operational inspection can be arranged for serious inquiries


If you are interested in these systems, please contact us to further discuss.

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