KLA-Tencor 6220 Surfscan For Sale

Model Year: 1998
Quantity: 2
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


KLA-Tencor 6220 Surfscan Automatic Surface Inspection System
Unpatterned Surface Inspection System
Wafer Size: 2" -  8" capable
Thickness: SEMI Standard Wafer Thickness
Defect Sensitivity: 0.09um with greater than 80% Capture Rate
Haze Sensitivity: 0.02 ppm
Haze Resolution: 0.002 ppm
Repeatability: less than 0.5% at 1 Standard Deviation
Accuracy: > 99%
Throughput: 100 wph (200 mm)
illumination Source: 30 mW Argon-Ion laser, 488 nm
Computer Hardware:
Main Processor – Pentium ™                                   
Processor speed -75 Mhz                                 
Base Memory-640Mb                                     
Ext Memory 31744Kb
Floppy drive-1.44Mb, 3.5inch
CD Player (Sccsi) installed
System Software Win 95
Applications SW 4.1
Database SW Access 2.0
Options enabled: GEM/SECS , X-Y Co-ordinates

Laser Blower Box
Operations Manual and Documentation

System can be purchased in as-is-where-is condition or fully refurbished with original specs guarantee.

Our refurbishment process consists of at least the following:
* New Laser
* Optics and mirrors cleaned or replaced, if required
* Power supply checked and replaced, if required
* Optics alignment
* Full calibration to confirm original specs compliance


Complete turn-key solution offered including refurbished system with demonstration at our facility in New Jersey, professional crating and shipping worldwide, installation and warranty support worldwide.

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