KLA-Tencor 6220 Surfscan For Sale

Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


  • Fully Automated Cassette to Cassette
  • Wafer size:  100,125,150,200mm
  • Sensitivity:  0.09µm @ 80% capture rate
  • Repeatability:  less than 1.0% at 1 of 0.204 diameter latex spheres on bare silicon
  • Illumination source is 30mW Argon-Ion laser, 488 wavelength
  • Contamination:  less than 0.005 particles/cm² greater than 0.15µm
  • Haze Sensitivity:  0.02ppm³



System is confirmed fully operational at our facility.  We can also provide it fully refurbished with new laser and full calibration.  Details of full refurbishment can be provided upon request.

It is available for inspection at our facility in Blackwood, NJ USA.

Installation and training available worldwide at additional cost. All services performed by very senior technicians with many years of OEM experience.

[Please answer this simple math question.]