KLA-Tencor SP1-TBi For Sale

Model Year: 2002
Quantity: 1
Condition: Excellent operational condition
Serial No: Available upon request
Availability: SOLD


KLA-Tencor Surfscan SP1-TBi

Non-Patterned Wafer Particle Measurement System

Triple Beam illumination (TBi)

Provides Sensitivity, Repeatability, Surface Quality Measurements & Throughput Capabilities Required for 0.18um Process Technologies & Beyond

Configured for 200mm/300mm wafers

Single Open Cassette Loader

Defect Sensitivity:
Normal Illumination- 0.079 Defect Sensitivity
Oblique Illumination- 0.060 Defect Sensitivity
0.005 ppm Haze Sensitivity
Real Time Defect Classification (RTDC)

Defect Map & Histogram with Zoom Micro View Measurement Capability

Illumination: 30 mW Argon-Ion Laser, 488nm Wavelength

Operator Interface: MS Windows NT 4.0

Flat Panel Display

Operations Manual


Full operational demonstration can be arranged at our facility in Blackwood, NJ.

System can be purchased in refurbished condition or in as-is condition. Please contact us if you are interested in considering this tool for purchase.

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