ALCATEL AMS-200 DRIE For Sale

Model Year:	2003
Quantity:	1
Condition:	Excellent operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Alcatel AMS-200 DRIE

Inductively Coupled Plasma configuration

Ceramic Clamp type

Wafer size : 6 inch

MKS Spectrum 3000W 13.56MHz RF Generator

ENI 500W 380 KHz RF Generator

Gases: SF6, C4F8, O2, O2

Process: Deep Silicon Etch

Comments:

System was fully operational when deinstalled in January 2015. Deinstallation audit report is attached as a pdf file. This system can be purchased in as-is condition or as refurbished system.