STS ASE ICP w/Bosch For Sale

Model Year:	1997
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Surface Technology Systems ICP etcher
• Configured for 150mm wafer size
• MFG Date: 1997; Serial# C046
• Install Type: Thru-the-wall (TTW)
• Cassette Interface Type: Single Load-Lock Chamber (Single Cassette)
• Robot Handler: Brooks VTR-5 (Single Blade)
• Process Chamber: ICP ASE
• Pedestal Type: ESC w/ He Back-side cooling
• Electrode Temp Control: +5 to +40deg C
• MKS 600 Pressure Controller (MKS Throttle Valve)
• Gate Valve
• Turbo: Lybold MAG1500CT w/MAG Drive Digital

Remote Gas Box:
Tylan FC-2900MFCs
1: C4F8 (1SLM), 2: SF6 (1SLM), 3: Ar (50sccm), 4: O2 (100sccm), 5: N2 (500sccm)

• STS Purge Panel Assembly

RF Cart:
RF Gen-1(Coil): ENI ACG-10B (1kW, 13.56MHz)
RF-Gen-2 (Platen): ENI ACG-3 (300/30W, 13.56MHz)
VL-400 Phase Shift Controller

Heat Exchanger/Chiller:
Betta-Tech CU500 Chiller (CE Marked, 230V / 10A)

Pumps:
(2) Edwards E2M40

• All Cables
• AC Dist Box: 400V, 3-phase, 50Hz
 

Comments:

This system is available for immediate purchase in as-is condition or in refubished condition with 3 months parts warranty.

Full power up inspection at our Blackwood, NJ USA facility can be scheduled upon request.

Please contact us for more details and price quote.