Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


Electrode holds up to 8 inch wafer. This is a manual load system so any wafer size up to 8 inche can be loaded and etched.

Four (4) gas channels, but capable of running 8

MKS 153D throttle valve

RF5S RF generator, 500W output, with AMN5 matching network and controller

ITR100 Ion Gauge

System computer was upgraded to Windows 98 from WIN 3.1

Standard Plasmatherm 790 SYSMON software which has built-in data logging, easy recipe building and editing

Leybold TMP-361C turbo molecular pump with Leybold NT150/360 turbo controller

Mechanical pump Edwards QDP40 

Neslab HX-75 Heat Exchanger for cooling Lower Electrode



Fully Refurbished System

One year parts warranty for non-consumable parts

Installation available worldwide

Please contact us to arrange functoinal demonstration

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