OXFORD Plasmalab 133 RIE (FL) For Sale

Model Year:	2006
Quantity:	1
Condition:	Complete system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

RIE set up for SiO2 Etch

330mm Platen

RF Generator:  Advanced Energy RFX 600A ;  600W, 13.56MHz,

Chamber Turbo pump: Alcatel ATH 400M  w/ ACT 600M controller

Blue color PLC type

Water cooled electrode 10C-80C

Gas pod with 6 lines including following MFCs:
Ar      - 100sccm
N2     - 200sccm
CHF3 - 200sccm
NF3   - 200sccm
N2O  - 200sccm

Windows PC , user friendly interface

Ebara Roughing pumps were utilized by previous user (NOT INCLUDED)

Lauda WK 1200 Chiller was utilized by previous user (NOT INCLUDED)

Comments:

This tool was removed from production October 2014.