OXFORD Plasmalab 100 ICP Etcher For Sale

Model Year:	2002
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

• ICP 180 Assembly
• Single wafer load lock
• HP computer with Intel Dual Core processor
• Operating system: windows XP professional
• Oxford Software Revision: PC 2000 V1.7a
• Capable of processing upto 8" wafers
• 205mm with backside Helium Cooling
• ICP RF power: 3kW
• Automatic Matching Unit Control
• VAT Adaptive Pressure Controller

 

Externally mounted gas pod with 6 lines with following MKS MFCs installed:

1. 1) Ar 50 sccm
2. 2) O2 100 sccm
3. 3) SF6 50 sccm
4. 4) N2 100 sccm
5. 5) SiCl4 20 sccm
6. 6) Space  (to add one more MFC)

• Alcatel Turbo pump (Chamber) : Alcatel ATH 1300-M
• Chamber roughing pump: Leybold D40BCS Vacuum Pump (roughing pump)
• Load Lock roughing pump

 

This system is well suited for at least the following applications:

• low damage etching of III-V's
• high rate SiO2 etching
• high rate anisotropic etch of Si for MEMS applications 

 

Comments:

• Refurbished system guaranteed to meet OEM specs. 
• 3 months parts warranty
• Full power up inspection at our Blackwood, NJ USA facility can be scheduled upon request.
• Also available for purchase in "As-is" condition

 

GCE has extensive experience with Sales, refurbishment, and support of Oxford Instrument models: 80+ , 800+ , 100+ in PECVD, RIE, and ICP configurations.  You are welcome to inspect prior to making a purchase commitment.  Buy with confidence from the company that stands behind what they sell.

 

Please contact us for more details and price quote.