OXFORD Plasmalab 133 RIE (FL) For Sale

Model Year: 2004
Quantity: 1
Condition: Complete system
Serial No: 417729
Availability: Immediate


This item can also be purchased via GCE's ebay sales agent: Oxford 133 RIE (FL) ebay listing

RIE set up for SiO2 Etch

330mm Platen

RF Generator:  Advanced Energy RFX 600A ;  600W, 13.56MHz,

Chamber Turbo pump: Alcatel ATH 400M  w/ ACT 600M controller

Blue color PLC type

Water cooled electrode 10C-80C

Gas pod with 6 lines including following MFCs:
Ar      - 100sccm
N2     - 200sccm
CHF3 - 200sccm
NF3   - 200sccm
N2O  - 200sccm

Windows PC , user friendly interface

Ebara Roughing pumps were utilized by previous user (NOT INCLUDED)

Lauda WK1200 Chiller was utilized by previous user (NOT INCLUDED)


This tool was removed from production October 2014.

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