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OXFORD Plasmalab 100 ICP Etcher For Sale

ICP 180 Assembly

Single wafer load lock

User friendly Windows PC interface

Capable of processing upto 8" wafers

205mm with backside Helium Cooling

Wafer Clamp: 200mm

ICP RF power: 3kW

Externally mounted gas pod with 6 lines: O2, SF6, CH4, H2, Cl2, Ar.

Chamber Turbo pump

Load lock Turbo pump

Chamber roughing pump

Load Lock roughing pump

This tool was powered down recently. It was in good operational condition.