OXFORD Plasmalab 133 RIE (CL) For Sale

Model Year: 2003
Quantity: 1
Condition: Complete system
Serial No: Available upon request
Availability: SOLD


RIE set up for GaN Etch

330mm Platen

RF Power: 600W, 13.56MHz

Water cooled electrode 10C-80C

Load Lock with turbo pump

End point detection: Verity Optical emission spectroscopy (200-800nm)

Gas pod with 6 lines including following MFCs:
Ar      - 100sccm
CL     - 100sccm
BCL3 - 100sccm
N2O   - 100sccm

Windows PC , user friendly interface




This tool was removed from production October 2014.

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