OXFORD Plasmalab 133 RIE (CL) For Sale

Model Year:	2003
Quantity:	1
Condition:	Complete system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

RIE set up for GaN Etch

330mm Platen

RF Power: 600W, 13.56MHz

Water cooled electrode 10C-80C

Load Lock with turbo pump

End point detection: Verity Optical emission spectroscopy (200-800nm)


Gas pod with 6 lines including following MFCs:
Ar      - 100sccm
CL     - 100sccm
BCL3 - 100sccm
N2O   - 100sccm

Windows PC , user friendly interface

 

 

Comments:

This tool was removed from production October 2014.