STS Multiplex ICP etcher (III-V) For Sale

Model Year:	1998
Quantity:	1
Condition:	Excellent operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Wafer size: 2" wafers (can be changed)
Windows driven user friendly operator interface
Loadlock chamber with cassette loading
Central handling chamber
Etching chamber
He backside cooling
End point detector
RF generator: 1000Watts
Gases used. : Cl2, N2, O2, Ar, He, HBR
Includes 3 ea. Edwards pumps (for load lock, handling chamber and etch chamber)

 

Comments:

This etcher is installed and fully operational in a cleanroom. It is available for immediate sale from GCE.

If you are interested in considering purchase of this system for your lab or fab, we welcome your inquiry.