STS Multiplex ICP etcher (III-V) For Sale

Model Year: 1998
Quantity: 1
Condition: Excellent operational condition
Serial No: Available upon request
Availability: SOLD

Configuration:

Wafer size: 2" wafers (can be changed)
Windows driven user friendly operator interface
Loadlock chamber with cassette loading
Central handling chamber
Etching chamber
He backside cooling
End point detector
RF generator: 1000Watts
Gases used. : Cl2, N2, O2, Ar, He, HBR
Includes 3 ea. Edwards pumps (for load lock, handling chamber and etch chamber)

 


Comments:

This etcher is installed and fully operational in a cleanroom. It is available for immediate sale from GCE.

If you are interested in considering purchase of this system for your lab or fab, we welcome your inquiry.

 

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