PLASMATHERM Unaxis SLR-770 ICP etcher For Sale

Model Year: 2001
Quantity: 1
Condition: Complete system
Serial No: Available upon request
Availability: SOLD


Plasmatherm Unaxis 770 ICP Etcher

Capable to upto 200mm wafers
Currently set up for 3" wafers (utilized to etch 3" InP wafers)

Load Lock

RF Gen#1:  AE  RF-20MWC,  2kW
RF Gen#2:  ENI ACG-6B,     600W

Lower Electrode Temp Control  (Heating & Cooling)
Chamber Wall Heater

Configured with following MFCs:

CL2:   60 SCCM
CF4:   30 SCCM
SF6:   40 SCCM
N2  :   40 SCCM
AR :   80 SCCM
He  : 100 SCCM
O2  : 100 SCCM

Oerlikon Leybold Turbo:  Model MAG W 1500 CT

Neslab HX-75 Chiller

Not included:
Chamber Roughing pump
Load Lock Roughing Pump
Jobin Yvon Horiba End Point Detector (Power supply is present and Cabling is present)



Complete system in excellent condition

Available for inspection.  Power up is possible.

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