PLASMATHERM Unaxis SLR-770 ICP etcher For Sale

Model Year:	2001
Quantity:	1
Condition:	Complete system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Plasmatherm Unaxis 770 ICP Etcher

Capable to upto 200mm wafers
Currently set up for 3" wafers (utilized to etch 3" InP wafers)

Load Lock

RF Gen#1:  AE  RF-20MWC,  2kW
RF Gen#2:  ENI ACG-6B,     600W

Lower Electrode Temp Control  (Heating & Cooling)
Chamber Wall Heater

Configured with following MFCs:

CL2:   60 SCCM
BCL3: 50 SCCM
CF4:   30 SCCM
SF6:   40 SCCM
N2  :   40 SCCM
AR :   80 SCCM
He  : 100 SCCM
O2  : 100 SCCM

Oerlikon Leybold Turbo:  Model MAG W 1500 CT

Neslab HX-75 Chiller

Not included:
Chamber Roughing pump
Load Lock Roughing Pump
Jobin Yvon Horiba End Point Detector (Power supply is present and Cabling is present)



 

Comments:

Complete system in excellent condition

Available for inspection.  Power up is possible.