NEXTRAL NE860 RIE (HDP) For Sale

Model Year:	1997
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Nextral NE860 is a High Density Plasma reactor (HDP) capable of dielectric etching for frontside de-processing, and of very fast etching for backside silicon thinning of packaged dies while maintaining full electrical functionality. In addition, the NE860 HDP achieves excellent etch uniformity on 200 mm (8”) wafers. 

The system features: 

• 3” – 8” wafers and pieces etching capability.
• RIE, HDP and mixed processes.
• Laser interferometer end point detector.
• SiO2, Si3N4, ONO, Photoresist, Si, Poly Si and ITO etch processes.
• Heat transfer through helium pressure between devices and cathode permits excellent temperature control.
• Very high etch rates in HDP (microwave plasma) and mixed modes.
• Previously used for delayering and removal of passivation layers
• Gas Lines:  Ar, O2, SF6, CF4, CHF3 
• He cooling
• Complete system with Chiller and roughing pump

Comments:

• System is guaranteed to meet OEM specs 
• 3 months parts warranty

 

Full power up inspection at our Blackwood, NJ USA facility can be scheduled upon request.

Please contact us for more details and price quote.