OXFORD Plasmalab 100 ICP etcher For Sale

Model Year:	2001
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

• ICP 180 Assembly
• Single wafer load lock
• User friendly Windows PC interface
• Capable of processing upto 8" wafers
• 205mm with backside Helium Cooling
• Wafer Clamp: 200mm
• ICP RF power: 3kW
• Externally mounted gas pod with 6 lines: O2, SF6, CH4, H2, Cl2, Ar. 
• Alcatel Turbo pump (Chamber) : Alcatel ATP 80
• Alcatel Turbo pump (Load Lock) : Alcatel ATH 1300
• Chamber roughing pump 
• Load Lock roughing pump

Comments:

This tool is installed in cleanroom. Inspection can be arranged upon request.