STS ASE ICP w/Bosch For Sale

Model Year:	2001
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

• Advanced Silicon Etch Cluster Tool  (ASPECT)
• Cluster System with Cassette Automation
• Configured with single chamber presently; Second chamber can be added
• Standard Rate "Unified Module" with Leybold MAG900 Turbo and Unified Gas Box
• SOI process capable
• 4" ESC chuck (optional: 6" hardware available for purchase)
• Load lock roughing pump: Edwards IQDP80
• Chamber roughing pump: Edwards IQBP80
• Affinity RWA-012J Chiller

 

RF Trolley with following generators:

• Advanced Energy LF-5 500 Watt RF Generator
• ENI ACG-10B 1000 Watt 13.56 MHz RF Generator
• ENI Generator

 

Following manuals included: 

• Facility Preparation
• Operators Manuals
• System Schematics
• Parts documentation

 

 

Comments:

This system is available for immediate purchase in as-is condition or in refubished condition with 3 months parts warranty.

Full power up inspection at our Blackwood, NJ USA facility can be scheduled upon request.

Please contact us for more details and price quote.