CANON FPA-2500 i3 Stepper For Sale

Model Year: 1996
Quantity: 5
Condition: Good operational condition
Serial No: 510691,404573, 401555, 312547, 311540
Availability: Immediate

Configuration:

Wafer Size = 8" for steppers with serial# : 404573,401555,312547,311540
Wafer Size = 6" for steppers with serial# : 510691

Reticle Size: 5" square for steppers with serial# : 404573,401555,312547,311540
Reticle Size: 6" square for steppers with serial# : 510691

Original published performance specs of stepper when new :
Resolution: 0.40 μm
Alignment: 100nm
Uniformity: ≤ 1.2 %
Intensity:  5500 W/m2

Throughput:
≥ 68 wafers/hour (6”, 32 shots)
≥ 44 wafers / hour (8”, 60 shot)

General specifications:
Magnification: 1/5 X
Image Field: 20mm x 20mm
Numerical Aperture: 0.52 ~ 0.60
Illumination Light Source: 1.5KW Super High Pressure Hg Lamp

Alignment Modes:
TTL Off-Axis He-Ne TV
TTL Off-Axis Broad Band TV

Alignment Light Source: 
He-Ne laser (633 nm)
Broad Band (Halogen lamp)

Wafer Leveling: Die by die tilt,  Global tilt

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Below Data for tool with serial number: 401555
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Wafer size: 8"
Reticle size: 5"
Installed and fully operational at GCE facility in Livermore, CA
IUC last checked in Nov 2017
Uniformity ~ 3.3%\
Intensity 4,750 w/m2
Operational demonstration can be arranged
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Comments:

Our Canon i3 steppers are offered in as-is-where-is condition

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