NIKON NSR-i14 Stepper For Sale
|Serial No:||Available upon request|
Exact Model is Nikon NSR-TFHi14DL
Optimized for TFH (Thin-Film Magnetic Head) substrates but can also process standard wafers
Reticle Size: 6"
Wafer : 6" Flat
Wafer thickness: 1.2mm
(No problem to run standard thickness wafers. Even thinner wafers can be run with customized wafer chucks which we can provide)
Resolution in thick resist: 0.50um +/- 10%
Projection Magnification: 5x
NA= 0.3 - 0.45
Wafer Loader Type 3
Depth of Focus (0.1um CD range)
Intensity: 1035mW/cm2 actual ( Spec >= 700mW/cm2)
Uniformity: 1.078% actual (Spec <=1.5% spec)
Distortion: X= 30nm, Y=27nm (spec <= +/-40nm)
This stepper can be purchased in as-is condition or in fully refurbished condition with installation and training worldwide.
Status as of Jan 2016:
The stepper is installed in cleanroom and is fully operational and has been already ~70% refurbished
Majority of performance data is within original specs. See attached file for Distortion map, Intensity/Uniformity, hardware/software specifics, etc.
Inspection with wafer runs can be scheduled upon request.