NIKON NSR-S202A For Sale

Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD

Configuration:

  • Light Source:  KrF Excimer Laser, 248nm
  • Resolution:  0.25um
  • NA:  0.60
  • Wafer:  8"
  • Reticle:  6"
  • Reduction:  4:1
  • Exposure Field:  25 x 33 mm
  • Alignment Accuracy:  40 nm
  • Throughput:  80 Wafers/hr

Comments:

Offered as-is or refurbished with installation and start up.

[Please answer this simple math question.]