NIKON NSR-S202A For Sale

Model Year:	1998
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

• Light Source:  KrF Excimer Laser, 248nm
• Resolution:  0.25um
• NA:  0.60
• Wafer:  8"
• Reticle:  6"
• Reduction:  4:1
• Exposure Field:  25 x 33 mm
• Alignment Accuracy:  40 nm
• Throughput:  80 Wafers/hr

Comments:

Offered as-is or refurbished with installation and start up.