CANON FPA-3000 iW Stepper For Sale
| Model Year: | 2000 |
| Quantity: | 1 |
| Condition: | Refurbished system |
| Serial No: | Available upon request |
| Availability: | SOLD |
Configuration:
Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size: 6" Square
Field Size: 50 X 50mm
Exposure Light: 365nm, i-line
Light Source: 2.0KW Super High Pressure Hg Lamp
Projection Magnification: 1/2 X
Numerical Aperture: 0.24
Estimated Throughput:
115wph (14 shot / 50mm / 8” Wafer)
120wph ( 9 shot / 50mm / 6" Wafer)
