CANON FPA-3000 iW Stepper For Sale

Model Year: 2000
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD

Configuration:



Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size:  6" Square
Field Size:  50 X 50mm

Exposure Light: 365nm, i-line
Light Source:  2.0KW Super High Pressure Hg Lamp

Projection Magnification: 1/2 X
Numerical Aperture:  0.24

Estimated Throughput:
115wph (14 shot / 50mm / 8” Wafer)
120wph ( 9 shot / 50mm / 6" Wafer)

 

 


Comments:



Parts Available For CANON FPA-3000 iW Stepper

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