NIKON NSR-S203B DUV Scanner For Sale

Model Year: 1999
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


•Reduction:  4x
•NA:  0.68
•Resolution:  0.18um
•Image Field Size(max): 25mm x 33mm
•Wafer size:  8"
•Reticle Size:  6" x 6",  0.25" thick
•Alignment Accuracy:40nm
•Illumination Uniformity: 1.6 %
•Auto-Leveling Accuracy: 100 nm
•Stepping Accuracy:  25nm

Configured as:
•Wafer size:  Set for 8"
•Wafer Shape:  Notch
•Number of Reticle Cassettes:  30
•Reticle size:  6"
•Alignments:  FIA, LSA, LIA
•Cymer ELS-5400 KrF laser, 248nm Wavelength
•Can be interfaced with Track system or can be used as stand alone configuration. Previously, this stepper was interfaced with TEL track system


This wafer scanner is being offered fully refurbished with full start up and qualification WORLDWIDE.  Inspection is welcome anytime.

[Please answer this simple math question.]