NIKON NSR-S203B DUV Scanner For Sale

Model Year:	1999
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Specifications:
•Reduction:  4x
•NA:  0.68
•Resolution:  0.18um
•Image Field Size(max): 25mm x 33mm
•Wafer size:  8"
•Reticle Size:  6" x 6",  0.25" thick
•Alignment Accuracy:40nm
•Illumination Uniformity: 1.6 %
•Auto-Leveling Accuracy: 100 nm
•Stepping Accuracy:  25nm

Configured as:
•Wafer size:  Set for 8"
•Wafer Shape:  Notch
•Number of Reticle Cassettes:  30
•Reticle size:  6"
•Alignments:  FIA, LSA, LIA
•Cymer ELS-5400 KrF laser, 248nm Wavelength
•Can be interfaced with Track system or can be used as stand alone configuration. Previously, this stepper was interfaced with TEL track system

Comments:

This wafer scanner is being offered fully refurbished with full start up and qualification WORLDWIDE.  Inspection is welcome anytime.