CANON FPA-3000 EX4 DUV Stepper For Sale

Model Year:	1998
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Specifications:

• Magnification: 5:1 Reduction
• NA: 0.4 ~ 0.6 Variable
• Resolution: < 0.25um
• Image Field Size: 22mm x 22mm ~ 17mm x 26mm
• Light Source: Wavelength 248nm ; Pulse Frequency 1kHz; Power 10W
• Reticle Size: 6" x 6",  0.25" thick
• Wafer size: Max 8"
• Auto-Alignment:  Off-Axis Broad-Band; Off-Axis He-Ne
• Stage Repeatability: < 35nm
• Dimensions: W1900 x D2600 x H2450 (mm)

Configured as:

• Wafer size: Set for 8"
• Wafer size conversion to 6" or  4" is available
• Wafer Shape: Notch
• Chuck Type: Pin Chuck or Ring Chuck
• Number of Reticle Cassettes: 14
• Reticle size: 6"
• Reticle Barcode Reader
• Cassette Barcode Reader
• Current Software Version: V11.07A4
• Cymer ELS-5300 KrF laser, 248nm Wavelength

 

Comments:

This tool is being offered fully refurbished with full start up and qualification at your fab. Also includes full parts and labor warranty. 

 

WE DO HAVE SPARE PARTS FOR SALE FOR THIS TESTER.  IF INTERESTED, PLEASE CONTACT US:  info@gcemarket.com