CANON FPA-3000 EX4 DUV Stepper For Sale

Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: 7114002
Availability: Immediate


This wafer stepper was fully refurbished by the OEM, Canon, in Japan.  GCEMarket is the owner of this tool and are offering it WORLDWIDE with installation and 3 months parts and labor warranty.  Customization, modification, and training are also available with purchase.


  • Magnification: 5:1 Reduction
  • NA: 0.4 ~ 0.6 Variable
  • Resolution: < 0.25um
  • Image Field Size: 22mm x 22mm ~ 17mm x 26mm
  • Light Source: Wavelength 248nm ; Pulse Frequency 1kHz; Power 10W
  • Reticle Size: 6" x 6",  0.25" thick
  • Wafer size: Max 8"
  • Auto-Alignment:  Off-Axis Broad-Band; Off-Axis He-Ne
  • Stage Repeatability: < 35nm
  • Dimensions: W1900 x D2600 x H2450 (mm)

Configured as:

  • Wafer size: Set for 8"
  • Wafer size conversion to 6" or  4" can be quoted
  • Wafer Shape: Notch
  • Chuck Type: Pin Chuck or Ring Chuck (please specify)
  • Number of Reticle Cassettes: 14
  • Reticle size: 6"
  • Reticle Barcode Reader
  • Cassette Barcode Reader
  • Current Software Version: V11.07A4
  • Cymer ELS-5300 KrF laser, 248nm Wavelength

Optional Accessories:

  • Chuck Maintenance Unit w/case
  • Bar Mirror Case
  • Chuck Case

Full performance data is available upon request. Pictures are for illustration purpose only and they are of a similar system. This system is fully crated and ready for immediate shipment.


This tool is being offered fully refurbished with full start up and qualification at your fab. Also includes full parts and labor warranty. 

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