CANON FPA-3000 EX4 DUV Stepper For Sale
|Serial No:||Available upon request|
- Magnification: 5:1 Reduction
- NA: 0.4 ~ 0.6 Variable
- Resolution: < 0.25um
- Image Field Size: 22mm x 22mm ~ 17mm x 26mm
- Light Source: Wavelength 248nm ; Pulse Frequency 1kHz; Power 10W
- Reticle Size: 6" x 6", 0.25" thick
- Wafer size: Max 8"
- Auto-Alignment: Off-Axis Broad-Band; Off-Axis He-Ne
- Stage Repeatability: < 35nm
- Dimensions: W1900 x D2600 x H2450 (mm)
- Wafer size: Set for 8"
- Wafer size conversion to 6" or 4" is available
- Wafer Shape: Notch
- Chuck Type: Pin Chuck or Ring Chuck
- Number of Reticle Cassettes: 14
- Reticle size: 6"
- Reticle Barcode Reader
- Cassette Barcode Reader
- Current Software Version: V11.07A4
- Cymer ELS-5300 KrF laser, 248nm Wavelength
This tool is being offered fully refurbished with full start up and qualification at your fab. Also includes full parts and labor warranty.
WE DO HAVE SPARE PARTS FOR SALE FOR THIS TESTER. IF INTERESTED, PLEASE CONTACT US: firstname.lastname@example.org