CANON FPA-3000 EX4 DUV Stepper For Sale
|Serial No:||may vary|
|Availability:||Qty and availability may vary|
- Magnification: 5:1 Reduction
- NA: 0.4 ~ 0.6 Variable
- Resolution: < 0.25um
- Image Field Size: 22mm x 22mm ~ 17mm x 26mm
- Light Source: Wavelength 248nm ; Pulse Frequency 1kHz; Power 10W
- Reticle Size: 6" x 6", 0.25" thick
- Wafer size: Max 8"
- Auto-Alignment: Off-Axis Broad-Band; Off-Axis He-Ne
- Stage Repeatability: < 35nm
- Dimensions: W1900 x D2600 x H2450 (mm)
- Wafer size: Set for 8"
- Wafer size conversion to 6" or 4" is available
- Wafer Shape: Notch
- Chuck Type: Pin Chuck or Ring Chuck
- Number of Reticle Cassettes: 14
- Reticle size: 6"
- Reticle Barcode Reader
- Cassette Barcode Reader
- Current Software Version: V11.07A4
- Cymer ELS-5300 KrF laser, 248nm Wavelength
This tool is being offered fully refurbished with full start up and qualification at your fab. Also includes full parts and labor warranty.