KARL SUSS MA/BA6 BSA Mask Aligner For Sale

Model Year:	2001
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

SUSS MA/BA6 BSA MASK ALIGNER consisting of:

- Model: MA/BA6 BSA
- Topside and Backside Alignment (TSA / BSA)
- Wafer size: up to 6”/150mm diameter wafers
- Suss DVM6 Microscope (Dual Video Microscope)
- Objectives: 5x, 10x, 25x (2 sets)
- UV400 Optics (for 365nm and 405nm exposure)
- Suss CIC 1200 Power Supply
- Capable of Hard, Soft, Vacuum, and Proximity Contact
- 1000W Lamphouse
- LCD Monitor
- Optional: Vibration Isolation Table
- 1 Vacuum Chuck: 6” diameter (or as required)
- 1 Maskholder: for 7"x7” masks (or as required)
- System Power: 230V, 50/60 Hz
- Operations Manual for Suss MA/BA6 Mask Aligner
- Refurbished to meet original Suss MA/BA6 specifications


SUSS MA/BA6 BSA MASK ALIGNER REFURBISHMENT PROCESS consisting of:

- All subassemblies are disassembled, cleaned, lubricated, reassembled and adjusted, and
tested to verify operation to original specifications
- Wafer Alignment Stage rebuilt
- WEC Head rebuilt
- Transport Slide rebuilt
- Microscope Assembly rebuilt
- Exposure Optics cleaned, tested and adjusted
- Lamp Power Supply tested
- System Wiring checked, tested, replaced as required
- Pneumatic tubing tested and replaced as needed
- Relays and controller circuits checked, tested, replaced as required
- Pneumatic Regulators checked, tested, replaced as required
- Any worn or damaged parts are repaired or replaced
- Full optical alignment of Microscope performed
- Machine is fully re-assembled
- Machine is fully tested to verify compliance to original specification

 

Comments:

Fully refurbished system. Avaiable with installation service worldwide.