CANON FPA-3000 i5++ Stepper For Sale

Model Year: 2000
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


Wafer: 4”, 5”, 6" or 8" (Notch or Flat)
Reticle: 6" Square

General Specification and Information:
Model: FPA 3000 i5++
First year available: 1999
Lens Type: UL34II
Stage Type: FLAT
Chamber Type: CD 83

Projection Optics:
Projection Magnification: 1/5 X
Exposure Light: 365nm
Numerical Aperture: 0.45 – 0.63nm
Field Size: 22mm (17x26mm)

Standard Illumination:
Exposure Light: i-Line
Light Source: 2.7kW Super High Pressure Hg Lamp
Intensity: >13000W/m2
Uniformity: < 1.0%
Masking Blade Accuracy: Grey Zone ≤60um

Printing Performance:
Resolution:< 0.25µm
Depth of Focus: R≥1.2µm (Target Line Width= 0.35um L&S)
Image Field Deviation: ≤20µm (HV Difference)
Distortion: <±35nm

Focus/Leveling Performance:
Focus Repeatability: <0.10µm (3sigma)
Leveling Repeatability: <7ppm (3sigma)

Wafer Alignment Performance:
Lighting Source: He-Ne Laser, Broad Band(Halogen Lamp)
Signal Process: TV Image Processing
System: Off Axis TTL
Mode: AGA

Standard Stage Specification:
Step Accuracy: <0.035µm (3sigma)
Scaling: <±0.5ppm
Orthogonality: <±0.5ppm

Standard Alignment Specification:
Reticle Rotation Accuracy: <±0.01µm
Wafer Alignment: <0.05µm mean + 3sigma
Reticle Rotation Repeatability: <0.015µm

Standard Size: 6" square t=0.25" ( Patticle checker)
Material: Quartz
Pattern Material: 2 layer CR, 3 Layer CR
Pellicle Frame: Pattern Side only Stand Off= 6.3mm

Reticle Particle Checker Specification:

Detection Resolution
Pattern Surface: >0.6µm
Glass Surface: >15µm
Pellicle Surface: >20µm

Detection Repeatability: >95%
Wafer Size: Standard 8” ( 4” thru 8” SEMI Standard, JEIDA,Notch / Flat, Optional)
Throughput: 102wph 200mm ( 8” Wafer)
Throughput: 120wph 150mm ( 6” Wafer)
Environmental Chamber Specification: N/A
Cleanness: Class 1(>0.1µm)

Chamber Specifications:
Chamber Type: CD83
Air Conditioner: Y77-1813 (CC150X16)
Refrigerant: HCFC22
Gram (g): 5000
Pounds (lbs): 11.02



This Canon i5++ Stepper is being offered fully refurbished with installation and 3 months parts and labor warranty worldwide. Refurbishment lead time is estimated at 3 months. Full operational demo for buy off at our facility. We are also offering TEL ACT 8, Single Block, i-line, Coater/Developer from our stock. Turn-key Stepper/Track package can be quoted at very attractive price.

Please contact us to discuss this, if you have near term or long term need.


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